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Secondary ion emission from a GaAs single crystal upon bombardment with Bim+ cluster ions
Secondary-ion mass spectra and energy distributions upon bombarding a gallium arsenide single crystal using Bi m + ( m = 1–5) cluster ions with energies of 2–12 keV are investigated. The gallium cluster ion yield grew nonadditively with the number of atoms in the cluster projectiles. A quasi-thermal...
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Published in: | Bulletin of the Russian Academy of Sciences. Physics 2016, Vol.80 (2), p.105-108 |
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Main Authors: | , |
Format: | Article |
Language: | English |
Subjects: | |
Online Access: | Get full text |
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Summary: | Secondary-ion mass spectra and energy distributions upon bombarding a gallium arsenide single crystal using Bi
m
+
(
m
= 1–5) cluster ions with energies of 2–12 keV are investigated. The gallium cluster ion yield grew nonadditively with the number of atoms in the cluster projectiles. A quasi-thermal component found in the energy spectra of secondary Ga
+
and Ga
2
+
ions is indicative of the occurrence of the thermal spike mode upon cluster ion bombardment. The quasi-thermal component in the yield of atomic Ga
+
ions upon bombardment with Bi
2
+
–Bi
5
+
–ions is 35–75%. |
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ISSN: | 1062-8738 1934-9432 |
DOI: | 10.3103/S1062873816020210 |