On-chip temperature compensation in an integrated slot-waveguide ring resonator refractive index sensor array

We present an experimental study of an integrated slot-waveguide refractive index sensor array fabricated in silicon nitride on silica. We study the temperature dependence of the slot-waveguide ring resonator sensors and find that they show a low temperature dependence of -16.6 pm/K, while at the sa...

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Bibliographic Details
Published in:Optics express 2010-02, Vol.18 (4), p.3226-3237
Main Authors: Gylfason, Kristinn B, Carlborg, Carl Fredrik, Kaźmierczak, Andrzej, Dortu, Fabian, Sohlström, Hans, Vivien, Laurent, Barrios, Carlos A, van der Wijngaart, Wouter, Stemme, Göran
Format: Article
Language:English
Subjects:
DENSITY
DEVICES
Electrical engineering, electronics and photonics
Elektroteknik, elektronik och fotonik
Equipment Design
Equipment Failure Analysis
Refractometry - instrumentation
SILICON
Systems Integration
TECHNOLOGY
TEKNIKVETENSKAP
Temperature
Transducers
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Summary:We present an experimental study of an integrated slot-waveguide refractive index sensor array fabricated in silicon nitride on silica. We study the temperature dependence of the slot-waveguide ring resonator sensors and find that they show a low temperature dependence of -16.6 pm/K, while at the same time a large refractive index sensitivity of 240 nm per refractive index unit. Furthermore, by using on-chip temperature referencing, a differential temperature sensitivity of only 0.3 pm/K is obtained, without individual sensor calibration. This low value indicates good sensor-to-sensor repeatability, thus enabling use in highly parallel chemical assays. We demonstrate refractive index measurements during temperature drift and show a detection limit of 8.8 x 10-6 refractive index units in a 7 K temperature operating window, without external temperature control. Finally, we suggest the possibility of athermal slot-waveguide sensor design.
ISSN:1094-4087
1094-4087
DOI:10.1364/oe.18.003226