Low-power microelectromechanically tunable silicon photonic ring resonator add-drop filter

We experimentally demonstrate a microelectromechanically (MEMS) tunable photonic ring resonator add-drop filter, fabricated in a simple silicon-on-insulator (SOI) based process. The device uses electrostatic parallel plate actuation to perturb the evanescent field of a silicon waveguide, and achieve...

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Bibliographic Details
Published in:Optics letters 2015-08, Vol.40 (15), p.3556-3559
Main Authors: Errando-Herranz, Carlos, Niklaus, Frank, Stemme, Göran, Gylfason, Kristinn B
Format: Article
Language:English
Subjects:
Electrical Engineering
Elektro- och systemteknik
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Summary:We experimentally demonstrate a microelectromechanically (MEMS) tunable photonic ring resonator add-drop filter, fabricated in a simple silicon-on-insulator (SOI) based process. The device uses electrostatic parallel plate actuation to perturb the evanescent field of a silicon waveguide, and achieves a 530 pm resonance wavelength tuning, i.e., more than a fourfold improvement compared to previous MEMS tunable ring resonator add-drop filters. Moreover, our device has a static power consumption below 100 nW, and a tuning rate of -62  pm/V, i.e., the highest reported rate for electrostatic tuning of ring resonator add-drop filters.
ISSN:0146-9592
1539-4794
1539-4794
DOI:10.1364/OL.40.003556