An optical IR-source and CO2-chamber system for CO2 measurements

The electrically modulated sources present a modulation time of 10 ms and a power consumption of 1 W. The CO2 chambers, placed beneath the reference sources, are used to produce a reference beam for long term stability and compensation against cuvette window contamination.

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Bibliographic Details
Published in:Journal of microelectromechanical systems 2000-12, Vol.9 (4), p.509-516
Main Authors: CORMAN, Thierry, KÄLVESTEN, Edvard, HUIKU, Matti, WECKSTRÖM, Kurt, MERILÄINEN, Pekka Tuomo, STEMME, Göran
Format: Article
Language:English
Subjects:
CO2-filter
Exact sciences and technology
gas sensor
General equipment and techniques
infrared IR-source
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
microfilaments
micromachining
Physics
Sensors (chemical, optical, electrical, movement, gas, etc.)
remote sensing
Silicon nitride
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Description
Summary:The electrically modulated sources present a modulation time of 10 ms and a power consumption of 1 W. The CO2 chambers, placed beneath the reference sources, are used to produce a reference beam for long term stability and compensation against cuvette window contamination.
ISSN:1057-7157
1941-0158
1941-0158
DOI:10.1109/84.896773