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CeO2 on Si(111) 7 X 7 and Si(111)-H 1 X 1, an interface study by high-resolution photoelectron spectroscopy

The formation of the CeO2-Si(111) interface was studied by high-resolution photoelectron spectroscopy. It is shown that CeO2 and Si(111) forms a highly reactive: interface with a strong interdiffusion of Si into the CeO2. A passive silicon surface formed by saturating the Si dangling bonds with hydr...

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Bibliographic Details
Published in:Applied surface science 1999-07, Vol.148 (3-4), p.164-170
Main Authors: HIRSCHAUER, B, GĂ–THELID, M, JANIN, E, LU, H, KARLSSON, U. O
Format: Article
Language:English
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Summary:The formation of the CeO2-Si(111) interface was studied by high-resolution photoelectron spectroscopy. It is shown that CeO2 and Si(111) forms a highly reactive: interface with a strong interdiffusion of Si into the CeO2. A passive silicon surface formed by saturating the Si dangling bonds with hydrogen is considerably less reactive. Defects on the surface, however, act as nucleations centres for reactions of a Si:Ce:O matrix. Oxygen leaves the surface at about 800 degrees C and at 1000 degrees C a surface reconstruction of Si(111)-Ce 2 X 2/root 3 X root 3 is formed. (C) 1999 Elsevier Science B.V. All rights reserved.
ISSN:0169-4332
1873-5584
1873-5584
DOI:10.1016/S0169-4332(99)00218-4