Loading…

Experimentally established correlation between ion charge state distributions and kinetic ion energy distributions in a direct current vacuum arc discharge

DC arc plasmas from Al, Ti, Cu, Mo, and W cathodes have been characterized with respect to plasma chemistry and charge-state-resolved ion energy. The evaluated average ionization energies in the plasmas were found to be linearly correlated with the kinetic ion energies. This was further supported by...

Full description

Saved in:
Bibliographic Details
Published in:Journal of applied physics 2015-03, Vol.117 (9), p.093301
Main Authors: Zhirkov, Igor, Oks, Efim, Rosen, Johanna
Format: Article
Language:English
Subjects:
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:DC arc plasmas from Al, Ti, Cu, Mo, and W cathodes have been characterized with respect to plasma chemistry and charge-state-resolved ion energy. The evaluated average ionization energies in the plasmas were found to be linearly correlated with the kinetic ion energies. This was further supported by evaluation of previously published data for 42 elements. A comparison of the total ion kinetic energy distribution and the corresponding ion charge state distribution, as defined by the ionization energies of the constituent ions, showed close to equivalent shapes and widths, for all cathodes analyzed. This suggests that the energy provided for ionization and acceleration varies simultaneously during plasma generation in the arc spot. The presented results provide a link between the ionization and acceleration processes, and may provide further insight into the fundamentals of cathode spot evolution and plasma generation.
ISSN:0021-8979
1089-7550
1089-7550
DOI:10.1063/1.4914301