Mueller matrix ellipsometer using dual continuously rotating anisotropic mirrors

We demonstrate calibration and operation of a single wavelength (660 nm) Mueller matrix ellipsometer in normal transmission configuration using dual continuously rotating anisotropic mirrors. The mirrors contain highly spatially coherent nanostructure slanted columnar titanium thin films deposited o...

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Bibliographic Details
Published in:Optics letters 2020-07, Vol.45 (13), p.3541-3544
Main Authors: Ruder, Alexander, Wright, Brandon, Peev, Darin, Feder, Rene, Kilic, Ufuk, Hilfiker, Matthew, Schubert, Eva, Herzinger, Craig M., Schubert, Mathias
Format: Article
Language:English
Subjects:
Ellipsometry
Glass substrates
Incidence angle
Matrix methods
Mirrors
Polarization
Polarized light
Polarizers
Rotation
Stokes parameters
Thick films
Thin films
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Summary:We demonstrate calibration and operation of a single wavelength (660 nm) Mueller matrix ellipsometer in normal transmission configuration using dual continuously rotating anisotropic mirrors. The mirrors contain highly spatially coherent nanostructure slanted columnar titanium thin films deposited onto optically thick gold layers on glass substrates. Upon rotation around the mirror normal axis, sufficient modulation of the Stokes parameters of light reflected at oblique angle of incidence is achieved. Thereby, the mirrors can be used as a polarization state generator and polarization state analyzer in a generalized ellipsometry instrument. A Fourier expansion approach is found sufficient to render and calibrate the effects of the mirror rotations onto the polarized light train within the ellipsometer. The Mueller matrix elements of a set of anisotropic samples consisting of a linear polarizer and a linear retarder are measured and compared with model data, and very good agreement is observed.
ISSN:0146-9592
1539-4794
1539-4794
DOI:10.1364/OL.398060