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Synthesis of phosphorus-carbide thin films by magnetron sputtering
Phosphorus‐carbide, CPx (0.025 ≤ x ≤ 0.1), thin films have been synthesized by magnetron sputtering from pressed graphite–phosphorus targets. The films were characterized by X‐ray photoelectron spectroscopy, transmission electron microscopy and diffraction, and nanoindentation. CP0.1 ex‐hibits C–P b...
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Published in: | Physica status solidi. PSS-RRL. Rapid research letters 2008-08, Vol.2 (4), p.191-193 |
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Main Authors: | , , , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | Phosphorus‐carbide, CPx (0.025 ≤ x ≤ 0.1), thin films have been synthesized by magnetron sputtering from pressed graphite–phosphorus targets. The films were characterized by X‐ray photoelectron spectroscopy, transmission electron microscopy and diffraction, and nanoindentation. CP0.1 ex‐hibits C–P bonding in an amorphous structure with elements of curved graphene planes, yielding a material with unique short range order. These features are consistent with what has been predicted by our results of theoretically modeled synthetic growth of CPx . The films are mechanically resilient with hardness up to 24 GPa and elastic recovery up to 72%. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
The substitution of phosphorus for carbon in graphene induces a fullerene‐like (FL) structure. Here, such FL‐CPx thin solid films have been realized by magnetron sputter deposition. The films are found to be surprisingly hard and resilient to mechanical deformation. |
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ISSN: | 1862-6254 1862-6270 |
DOI: | 10.1002/pssr.200802077 |