ZnO nanoparticles or ZnO films: A comparison of the gas sensing capabilities

Zinc oxide is an interesting material for bio and chemical sensors. It is a semiconducting metal oxide with potential as an integrated multisensing sensor platform, which simultaneously detects parameters like change in field effect, mass and surface resistivity. In this investigation we have used r...

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Bibliographic Details
Published in:Sensors and actuators. B, Chemical Chemical, 2009-03, Vol.137 (1), p.94-102
Main Authors: Eriksson, Jens, Khranovskyy, Volodymyr, Söderlind, Fredrik, Käll, Per-Olov, Yakimova, Rositza, Spetz, Anita Lloyd
Format: Article
Language:English
Subjects:
Actuators
Detection
Gas sensor
Gas sensors
Metal oxides
Multisensing
Nanoparticles
NATURAL SCIENCES
NATURVETENSKAP
Platforms
Sensors
Zinc oxide
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Summary:Zinc oxide is an interesting material for bio and chemical sensors. It is a semiconducting metal oxide with potential as an integrated multisensing sensor platform, which simultaneously detects parameters like change in field effect, mass and surface resistivity. In this investigation we have used resistive sensor measurements regarding the oxygen gas sensitivity in order to characterize sensing layers based on electrochemically produced ZnO nanoparticles and PE–MOCVD grown ZnO films. Proper annealing procedures were developed in order to get stable sensing properties and the oxygen sensitivity towards operation temperature was investigated. The ZnO nanoparticles showed a considerably increased response to oxygen as compared to the films. Preliminary investigations were also performed regarding the selectivity to other gases present in car exhausts or flue gases.
ISSN:0925-4005
1873-3077
1873-3077
DOI:10.1016/j.snb.2008.10.072