Epitaxial Growth of CaMnO3–y Films on LaAlO3 (112¯0) by Pulsed Direct Current Reactive Magnetron Sputtering

CaMnO3 is a perovskite with attractive magnetic and thermoelectric properties. CaMnO3 films are usually grown by pulsed laser deposition or radio frequency magnetron sputtering from ceramic targets. Herein, epitaxial growth of CaMnO3–y (002) films on a (112¯0)‐oriented LaAlO3 substrate using pulsed...

Full description

Saved in:
Bibliographic Details
Published in:Physica status solidi. PSS-RRL. Rapid research letters 2022-04, Vol.16 (4), p.n/a
Main Authors: Ekström, Erik, Elsukova, Anna, Grasland, Justine, Palisaitis, Justinas, Ramanath, Ganpati, Persson, Per O. Å, Paul, Biplap, Eriksson, Fredrik, Febvrier, Arnaud le, Eklund, Per
Format: Article
Language:English
Subjects:
Antiphase boundaries
CaMnO3
Crystal growth
Direct current
Electron energy loss spectroscopy
Epitaxial growth
epitaxy
Hypoxia
Magnetic properties
Magnetron sputtering
Perovskites
Photoelectrons
Pulsed laser deposition
Pulsed lasers
PVD
Scanning transmission electron microscopy
Seebeck effect
Single crystals
Stacking faults
Substrates
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:CaMnO3 is a perovskite with attractive magnetic and thermoelectric properties. CaMnO3 films are usually grown by pulsed laser deposition or radio frequency magnetron sputtering from ceramic targets. Herein, epitaxial growth of CaMnO3–y (002) films on a (112¯0)‐oriented LaAlO3 substrate using pulsed direct current reactive magnetron sputtering is demonstrated, which is more suitable for industrial scale depositions. The CaMnO3–y shows growth with a small in‐plane tilt of
ISSN:1862-6254
1862-6270
1862-6270
DOI:10.1002/pssr.202100504