Spectroscopic ellipsometry characterization of amorphous carbon and amorphous, graphitic and fullerene-like carbon nitride thin films

• Published in: Thin solid films 2009-10, Vol.517 (24), p.6652-6658
• Main Authors: Berlind, T., Furlan, A., Czigany, Zs, Neidhardt, J., Hultman, L., Arwin, H.
• Format: Article
• Language: English
• Subjects: Amorphous carbon; Carbon nitride; Condensed matter: electronic structure, electrical, magnetic, and optical properties; Condensed matter: structure, mechanical and thermal properties; Cross-disciplinary physics: materials science; rheology; Deposition by sputtering; Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures; Exact sciences and technology; Fullerene-like; Fullerenes and related materials; diamonds, graphite; Materials science; Methods of deposition of films and coatings; film growth and epitaxy; NATURAL SCIENCES; NATURVETENSKAP; Physics; Specific materials; Spectral decomposition; Spectroscopic ellipsometry; Structural properties; Structure and morphology; thickness; Surface and interface electron states; Surface states, band structure, electron density of states; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties); Thin film structure and morphology; Transmission electron microscopy; X-ray photoelectron spectroscopy
• ISSN: 0040-6090; 1879-2731; 1879-2731
• DOI: 10.1016/j.tsf.2009.04.065

Carbon nitride (CN x ) and amorphous carbon (a-C) thin films are deposited by reactive magnetron sputtering onto silicon (001) wafers under controlled conditions to achieve amorphous, graphitic and fullerene-like microstructures. As-deposited films are analyzed by Spectroscopic Ellipsometry in the UV–VIS–NIR and IR spectral ranges in order to get further insight into the bonding structure of the material. Additional characterization is performed by High Resolution Transmission Electron Microscopy, X-ray Photoelectron Spectroscopy, and Atomic Force Microscopy. Between eight and eleven resonances are observed and modeled in the ellipsometrically determined optical spectra of the films. The largest or the second largest resonance for all films is a feature associated with C–N or C–C modes. This feature is generally associated with sp 3 C–N or sp 3 C–C bonds, which for the nitrogen-containing films instead should be identified as a three-fold or two-fold sp 2 hybridization of N, either substituted in a graphite site or in a pyridine-like configuration, respectively. The π→π⁎ electronic transition associated with sp 2 C bonds in carbon films and with sp 2 N bonds (as N bonded in pyridine-like manner) in CN x films is also present, but not as strong. Another feature present in all CN x films is a resonance associated with nitrile often observed in carbon nitrides. Additional resonances are identified and discussed and moreover, several new, unidentified resonances are observed in the ellipsometric spectra.