Electrical and optical properties of CNx(0⩽x⩽0.25) films deposited by reactive magnetron sputtering

The electrical and optical properties of carbon-nitride CNx films (0⩽x⩽0.25) deposited by unbalanced reactive magnetron sputtering from a graphite target in mixed Ar/N2 discharges at a substrate temperature of 350 °C have been investigated. Pure C films exhibit a dark conductivity at room temperatur...

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Bibliographic Details
Published in:Journal of applied physics 2001-01, Vol.89 (2), p.1184-1190
Main Authors: Broitman, E., Hellgren, N., Järrendahl, K., Johansson, M. P., Olafsson, S., Radnóczi, G., Sundgren, J.-E., Hultman, L.
Format: Article
Language:English
Subjects:
TECHNOLOGY
TEKNIKVETENSKAP
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Summary:The electrical and optical properties of carbon-nitride CNx films (0⩽x⩽0.25) deposited by unbalanced reactive magnetron sputtering from a graphite target in mixed Ar/N2 discharges at a substrate temperature of 350 °C have been investigated. Pure C films exhibit a dark conductivity at room temperature of 25 Ω−1 cm−1, which grows up to 250 Ω−1 cm−1 for CNx films with N content of 20%. For CNx films, temperature-dependent conductivity measurements suggest that two electron conduction processes exist in the investigated temperature range 130
ISSN:0021-8979
1089-7550
1089-7550
DOI:10.1063/1.1334370