Catalytic metals and field-effect devices—a useful combination

The properties of gas-sensitive field-effect devices with catalytic metal gates are described. We demonstrate especially how the selectivity of these sensors depends on parameters such as the choice of catalytic metal, the structure of the catalytic metal film and the operation temperature of the de...

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Bibliographic Details
Published in:Sensors and actuators. B, Chemical Chemical, 1990, Vol.1 (1), p.15-20
Main Authors: Lundström, I., Spetz, A., Winquist, F., Ackelid, U., Sundgren, H.
Format: Article
Language:English
Subjects:
TECHNOLOGY
TEKNIKVETENSKAP
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Summary:The properties of gas-sensitive field-effect devices with catalytic metal gates are described. We demonstrate especially how the selectivity of these sensors depends on parameters such as the choice of catalytic metal, the structure of the catalytic metal film and the operation temperature of the device. The sensitivity towards molecules like hydrogen, ammonia, ethanol and ethylene is demonstrated. The selectivity pattern of devices with catalytic metal gates is discussed in relation to the fabrication of multisensor arrays and the development of 'artificial olfactory senses'.
ISSN:0925-4005
1873-3077
1873-3077
DOI:10.1016/0925-4005(90)80164-U