Size-controlled growth of nanoparticles in a highly ionized pulsed plasma

Copper nanoparticles (NPs) were synthesized using a high power pulsed hollow cathode technique and the produced NPs were studied as a function of pulse parameters, i.e., frequency, peak current, and pulse width. It was found that the particle size can be altered in a range from 10 to 40 nm by changi...

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Bibliographic Details
Published in:Applied physics letters 2013-01, Vol.102 (3), p.033108
Main Authors: Pilch, I., Söderström, D., Brenning, N., Helmersson, U.
Format: Article
Language:English
Subjects:
Cluster
Copper
Discharge
Energy
Hollow cathodes
Ionization
Magnetron
Nanoparticles
Particle size
Particles
Plasma (physics)
Sputtering System
Synthesis
TECHNOLOGY
TEKNIKVETENSKAP
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Summary:Copper nanoparticles (NPs) were synthesized using a high power pulsed hollow cathode technique and the produced NPs were studied as a function of pulse parameters, i.e., frequency, peak current, and pulse width. It was found that the particle size can be altered in a range from 10 to 40 nm by changing any one of the pulse parameters. The mechanisms of NP synthesis with respect to a pulsed discharge and a high degree of ionization of the sputtered material are discussed.
ISSN:0003-6951
1077-3118
1077-3118
DOI:10.1063/1.4788739