Growth and structural properties of Mg:C thin films prepared by magnetron sputtering

We investigate the growth and structure properties of Mg:C thin films. The films are prepared using a dc magnetron sputtering discharge where the electrical resistance over the films is monitored during growth in-situ with a four point probe setup. The structural properties of the films are investig...

Full description

Saved in:
Bibliographic Details
Published in:Thin solid films 2010-05, Vol.518 (15), p.4225-4230
Main Authors: Ingason, A.S., Eriksson, A.K., Lewin, E., Jensen, J., Olafsson, S.
Format: Article
Language:English
Subjects:
Carbon
Carbon content
Chemistry
Chemistry with specialization in Inorganic Chemistry
Cross-disciplinary physics: materials science
rheology
Deposition by sputtering
Elastic recoil detection analysis
Exact sciences and technology
In-situ resistance measurements
Inorganic chemistry
Kemi
Kemi med inriktning mot oorganisk kemi
Magnesium
Magnetron sputtering
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
NATURAL SCIENCES
NATURVETENSKAP
Oorganisk kemi
Palladium
Phases
Physics
TECHNOLOGY
TEKNIKVETENSKAP
Theory and models of film growth
Thin films
X-ray diffraction
X-ray photoelectron spectroscopy
X-rays
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:We investigate the growth and structure properties of Mg:C thin films. The films are prepared using a dc magnetron sputtering discharge where the electrical resistance over the films is monitored during growth in-situ with a four point probe setup. The structural properties of the films are investigated using X-ray diffraction measurements and the elemental composition and binding in the films is determined using elastic recoil detection analysis and X-ray photoelectron spectroscopy. The results show that during co-sputtering the carbon flux influences the initial stages of the film growth. The films are made of polycrystalline magnesium grains embedded in a carbon network, the size of which depends on the carbon content, but amorphous phases cannot be excluded. The XPS measurements show the presence of carbidic carbon whereas X-ray measurements find no Mg:C phases. The overall stability of the films is found to depend on the carbon content, where stable films capped with a 14 nm Pd layer cannot be obtained with carbon content above 18%.
ISSN:0040-6090
1879-2731
1879-2731
DOI:10.1016/j.tsf.2009.12.082