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Growth and structural properties of Mg:C thin films prepared by magnetron sputtering

We investigate the growth and structure properties of Mg:C thin films. The films are prepared using a dc magnetron sputtering discharge where the electrical resistance over the films is monitored during growth in-situ with a four point probe setup. The structural properties of the films are investig...

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Published in:	Thin solid films 2010-05, Vol.518 (15), p.4225-4230
Main Authors:	Ingason, A.S., Eriksson, A.K., Lewin, E., Jensen, J., Olafsson, S.
Format:	Article
Language:	English
Subjects:	Carbon Carbon content Chemistry Chemistry with specialization in Inorganic Chemistry Cross-disciplinary physics: materials science rheology Deposition by sputtering Elastic recoil detection analysis Exact sciences and technology In-situ resistance measurements Inorganic chemistry Kemi Kemi med inriktning mot oorganisk kemi Magnesium Magnetron sputtering Materials science Methods of deposition of films and coatings film growth and epitaxy NATURAL SCIENCES NATURVETENSKAP Oorganisk kemi Palladium Phases Physics TECHNOLOGY TEKNIKVETENSKAP Theory and models of film growth Thin films X-ray diffraction X-ray photoelectron spectroscopy X-rays
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creator	Ingason, A.S. Eriksson, A.K. Lewin, E. Jensen, J. Olafsson, S.
description	We investigate the growth and structure properties of Mg:C thin films. The films are prepared using a dc magnetron sputtering discharge where the electrical resistance over the films is monitored during growth in-situ with a four point probe setup. The structural properties of the films are investigated using X-ray diffraction measurements and the elemental composition and binding in the films is determined using elastic recoil detection analysis and X-ray photoelectron spectroscopy. The results show that during co-sputtering the carbon flux influences the initial stages of the film growth. The films are made of polycrystalline magnesium grains embedded in a carbon network, the size of which depends on the carbon content, but amorphous phases cannot be excluded. The XPS measurements show the presence of carbidic carbon whereas X-ray measurements find no Mg:C phases. The overall stability of the films is found to depend on the carbon content, where stable films capped with a 14 nm Pd layer cannot be obtained with carbon content above 18%.
doi_str_mv	10.1016/j.tsf.2009.12.082
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subjects	Carbon Carbon content Chemistry Chemistry with specialization in Inorganic Chemistry Cross-disciplinary physics: materials science rheology Deposition by sputtering Elastic recoil detection analysis Exact sciences and technology In-situ resistance measurements Inorganic chemistry Kemi Kemi med inriktning mot oorganisk kemi Magnesium Magnetron sputtering Materials science Methods of deposition of films and coatings film growth and epitaxy NATURAL SCIENCES NATURVETENSKAP Oorganisk kemi Palladium Phases Physics TECHNOLOGY TEKNIKVETENSKAP Theory and models of film growth Thin films X-ray diffraction X-ray photoelectron spectroscopy X-rays
title	Growth and structural properties of Mg:C thin films prepared by magnetron sputtering
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