Self-aligned molding technology (SAMT) for fabrication of 3D structures with a foldable imprint mold

We propose self-aligned molding technology (SAMT) as a novel nanoimprint technique with a self-aligned foldable imprint mold to control size and shape of structures and particles for a broad range of materials. SAMT is a single-step molding process for complex 3D shaped structures and particles usin...

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Bibliographic Details
Published in:Applied nanoscience 2019-09, Vol.9 (6), p.1255-1263
Main Authors: Smolarczyk, Marek, Jablonka, Lukas, Reuter, Sabrina, Hillmer, Hartmut
Format: Article
Language:English
Subjects:
Alignment
Chemistry and Materials Science
Electron beam lithography
Injection molding
Materials Science
Membrane Biology
Molding (process)
Molds
Nanochemistry
Nanotechnology
Nanotechnology and Microengineering
Original Article
Self alignment
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Summary:We propose self-aligned molding technology (SAMT) as a novel nanoimprint technique with a self-aligned foldable imprint mold to control size and shape of structures and particles for a broad range of materials. SAMT is a single-step molding process for complex 3D shaped structures and particles using a reusable double-sided mold with a hinge. We present the fabrication process of SAMT molds, including electron beam lithography on a sloped surface, angular dry etching, and a template-based double inversion technique. We present fabricated SAMT molds and molding results of micro-scale 3D structures.
ISSN:2190-5509
2190-5517
2190-5517
DOI:10.1007/s13204-019-01050-0