Structural and electronic properties of low dielectric constant fluorinated amorphous carbon films

Fluorinated amorphous carbon (a-CFx) films were studied by high-resolution x-ray absorption, emission, and photoelectron spectroscopy. The composition and local bonding information were obtained and correlated with substrate temperature during deposition. The data suggest that the structure of the a...

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Bibliographic Details
Published in:Applied physics letters 1998-06, Vol.72 (25), p.3353-3355
Main Authors: Ma, Yanjun, Yang, Hongning, Guo, J., Sathe, C., Agui, A., Nordgren, J.
Format: Article
Language:English
Subjects:
DIAMOND
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Summary:Fluorinated amorphous carbon (a-CFx) films were studied by high-resolution x-ray absorption, emission, and photoelectron spectroscopy. The composition and local bonding information were obtained and correlated with substrate temperature during deposition. The data suggest that the structure of the a-CFx is mostly of carbon rings connected by CF2 groups. The cross linking increases with substrate temperature.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.121601