Structural and electronic properties of low dielectric constant fluorinated amorphous carbon films

Fluorinated amorphous carbon (a-CFx) films were studied by high-resolution x-ray absorption, emission, and photoelectron spectroscopy. The composition and local bonding information were obtained and correlated with substrate temperature during deposition. The data suggest that the structure of the a...

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Published in:Applied physics letters 1998-06, Vol.72 (25), p.3353-3355
Main Authors: Ma, Yanjun, Yang, Hongning, Guo, J., Sathe, C., Agui, A., Nordgren, J.
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Language:English
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DIAMOND
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cited_by cdi_FETCH-LOGICAL-c327t-71c65a810983004602b8a18f7fb20f33d625245d47e32a8f4a0bb775172292c93
cites cdi_FETCH-LOGICAL-c327t-71c65a810983004602b8a18f7fb20f33d625245d47e32a8f4a0bb775172292c93
container_end_page 3355
container_issue 25
container_start_page 3353
container_title Applied physics letters
container_volume 72
creator Ma, Yanjun
Yang, Hongning
Guo, J.
Sathe, C.
Agui, A.
Nordgren, J.
description Fluorinated amorphous carbon (a-CFx) films were studied by high-resolution x-ray absorption, emission, and photoelectron spectroscopy. The composition and local bonding information were obtained and correlated with substrate temperature during deposition. The data suggest that the structure of the a-CFx is mostly of carbon rings connected by CF2 groups. The cross linking increases with substrate temperature.
doi_str_mv 10.1063/1.121601
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fullrecord <record><control><sourceid>swepub_cross</sourceid><recordid>TN_cdi_swepub_primary_oai_DiVA_org_uu_70667</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>oai_DiVA_org_uu_70667</sourcerecordid><originalsourceid>FETCH-LOGICAL-c327t-71c65a810983004602b8a18f7fb20f33d625245d47e32a8f4a0bb775172292c93</originalsourceid><addsrcrecordid>eNo9kM1KxDAYRYMoOI6Cj5ClIB2_L2mTdjmMvzDgwp9tSNNEI52mJCmDb-9IxdXlcg93cQi5RFghCH6DK2QoAI_IAkHKgiPWx2QBALwQTYWn5Cylr0OtGOcL0r7kOJk8Rd1TPXTU9tbkGAZv6BjDaGP2NtHgaB_2tPPzfBhNGFLWQ6aun0L0g862o3oX4vgZpkSNjm0YqPP9Lp2TE6f7ZC_-ckne7u9eN4_F9vnhabPeFoYzmQuJRlS6RmhqDlAKYG2tsXbStQwc551gFSurrpSWM127UkPbSlmhZKxhpuFLcj3_pr0dp1aN0e90_FZBe3Xr39cqxA81TUqCEPJAX820iSGlaN0_j6B-TSpUs0n-AwejZpQ</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>Structural and electronic properties of low dielectric constant fluorinated amorphous carbon films</title><source>AIP - American Institute of Physics</source><source>AIP Digital Archive</source><creator>Ma, Yanjun ; Yang, Hongning ; Guo, J. ; Sathe, C. ; Agui, A. ; Nordgren, J.</creator><creatorcontrib>Ma, Yanjun ; Yang, Hongning ; Guo, J. ; Sathe, C. ; Agui, A. ; Nordgren, J.</creatorcontrib><description>Fluorinated amorphous carbon (a-CFx) films were studied by high-resolution x-ray absorption, emission, and photoelectron spectroscopy. The composition and local bonding information were obtained and correlated with substrate temperature during deposition. The data suggest that the structure of the a-CFx is mostly of carbon rings connected by CF2 groups. The cross linking increases with substrate temperature.</description><identifier>ISSN: 0003-6951</identifier><identifier>EISSN: 1077-3118</identifier><identifier>DOI: 10.1063/1.121601</identifier><language>eng</language><subject>DIAMOND</subject><ispartof>Applied physics letters, 1998-06, Vol.72 (25), p.3353-3355</ispartof><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c327t-71c65a810983004602b8a18f7fb20f33d625245d47e32a8f4a0bb775172292c93</citedby><cites>FETCH-LOGICAL-c327t-71c65a810983004602b8a18f7fb20f33d625245d47e32a8f4a0bb775172292c93</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>230,314,780,782,784,885,27924,27925</link.rule.ids><backlink>$$Uhttps://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-70667$$DView record from Swedish Publication Index$$Hfree_for_read</backlink></links><search><creatorcontrib>Ma, Yanjun</creatorcontrib><creatorcontrib>Yang, Hongning</creatorcontrib><creatorcontrib>Guo, J.</creatorcontrib><creatorcontrib>Sathe, C.</creatorcontrib><creatorcontrib>Agui, A.</creatorcontrib><creatorcontrib>Nordgren, J.</creatorcontrib><title>Structural and electronic properties of low dielectric constant fluorinated amorphous carbon films</title><title>Applied physics letters</title><description>Fluorinated amorphous carbon (a-CFx) films were studied by high-resolution x-ray absorption, emission, and photoelectron spectroscopy. The composition and local bonding information were obtained and correlated with substrate temperature during deposition. The data suggest that the structure of the a-CFx is mostly of carbon rings connected by CF2 groups. The cross linking increases with substrate temperature.</description><subject>DIAMOND</subject><issn>0003-6951</issn><issn>1077-3118</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>1998</creationdate><recordtype>article</recordtype><recordid>eNo9kM1KxDAYRYMoOI6Cj5ClIB2_L2mTdjmMvzDgwp9tSNNEI52mJCmDb-9IxdXlcg93cQi5RFghCH6DK2QoAI_IAkHKgiPWx2QBALwQTYWn5Cylr0OtGOcL0r7kOJk8Rd1TPXTU9tbkGAZv6BjDaGP2NtHgaB_2tPPzfBhNGFLWQ6aun0L0g862o3oX4vgZpkSNjm0YqPP9Lp2TE6f7ZC_-ckne7u9eN4_F9vnhabPeFoYzmQuJRlS6RmhqDlAKYG2tsXbStQwc551gFSurrpSWM127UkPbSlmhZKxhpuFLcj3_pr0dp1aN0e90_FZBe3Xr39cqxA81TUqCEPJAX820iSGlaN0_j6B-TSpUs0n-AwejZpQ</recordid><startdate>19980622</startdate><enddate>19980622</enddate><creator>Ma, Yanjun</creator><creator>Yang, Hongning</creator><creator>Guo, J.</creator><creator>Sathe, C.</creator><creator>Agui, A.</creator><creator>Nordgren, J.</creator><scope>AAYXX</scope><scope>CITATION</scope><scope>ADTPV</scope><scope>AOWAS</scope><scope>DF2</scope></search><sort><creationdate>19980622</creationdate><title>Structural and electronic properties of low dielectric constant fluorinated amorphous carbon films</title><author>Ma, Yanjun ; Yang, Hongning ; Guo, J. ; Sathe, C. ; Agui, A. ; Nordgren, J.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c327t-71c65a810983004602b8a18f7fb20f33d625245d47e32a8f4a0bb775172292c93</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>1998</creationdate><topic>DIAMOND</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Ma, Yanjun</creatorcontrib><creatorcontrib>Yang, Hongning</creatorcontrib><creatorcontrib>Guo, J.</creatorcontrib><creatorcontrib>Sathe, C.</creatorcontrib><creatorcontrib>Agui, A.</creatorcontrib><creatorcontrib>Nordgren, J.</creatorcontrib><collection>CrossRef</collection><collection>SwePub</collection><collection>SwePub Articles</collection><collection>SWEPUB Uppsala universitet</collection><jtitle>Applied physics letters</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Ma, Yanjun</au><au>Yang, Hongning</au><au>Guo, J.</au><au>Sathe, C.</au><au>Agui, A.</au><au>Nordgren, J.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Structural and electronic properties of low dielectric constant fluorinated amorphous carbon films</atitle><jtitle>Applied physics letters</jtitle><date>1998-06-22</date><risdate>1998</risdate><volume>72</volume><issue>25</issue><spage>3353</spage><epage>3355</epage><pages>3353-3355</pages><issn>0003-6951</issn><eissn>1077-3118</eissn><abstract>Fluorinated amorphous carbon (a-CFx) films were studied by high-resolution x-ray absorption, emission, and photoelectron spectroscopy. The composition and local bonding information were obtained and correlated with substrate temperature during deposition. The data suggest that the structure of the a-CFx is mostly of carbon rings connected by CF2 groups. The cross linking increases with substrate temperature.</abstract><doi>10.1063/1.121601</doi><tpages>3</tpages></addata></record>
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1077-3118
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subjects DIAMOND
title Structural and electronic properties of low dielectric constant fluorinated amorphous carbon films
url http://sfxeu10.hosted.exlibrisgroup.com/loughborough?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-02T13%3A35%3A00IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-swepub_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Structural%20and%20electronic%20properties%20of%20low%20dielectric%20constant%20fluorinated%20amorphous%20carbon%20films&rft.jtitle=Applied%20physics%20letters&rft.au=Ma,%20Yanjun&rft.date=1998-06-22&rft.volume=72&rft.issue=25&rft.spage=3353&rft.epage=3355&rft.pages=3353-3355&rft.issn=0003-6951&rft.eissn=1077-3118&rft_id=info:doi/10.1063/1.121601&rft_dat=%3Cswepub_cross%3Eoai_DiVA_org_uu_70667%3C/swepub_cross%3E%3Cgrp_id%3Ecdi_FETCH-LOGICAL-c327t-71c65a810983004602b8a18f7fb20f33d625245d47e32a8f4a0bb775172292c93%3C/grp_id%3E%3Coa%3E%3C/oa%3E%3Curl%3E%3C/url%3E&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true