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Decomposition of alkoxysilanes on the surface of a hot wire-study of the decomposition mechanism

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Bibliographic Details
Published in:Journal of the Electrochemical Society 1994-02, Vol.141 (2), p.542-545
Main Authors: TILLER, H.-J, WIENKE, J
Format: Article
Language:English
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ISSN:0013-4651
1945-7111
DOI:10.1149/1.2054763