Humidity sensing properties of spray deposited Fe doped TiO2 thin film

• Published in: Journal of semiconductors 2021-12, Vol.42 (12), p.69-78
• Main Authors: Gapale, Dipak L, Bardapurkar, Pranav P., Arote, Sandeep A., Dalvi, Sanjaykumar, Baviskar, Prashant, Borse, Ratan Y
• Format: Article
• Language: English
• Subjects: Fe doped TiO; humidity sensing; spray pyrolysis; thin films
• ISSN: 1674-4926
• DOI: 10.1088/1674-4926/42/12/122805

In the present work,ferrite (Fe) doped TiO2 thin films with different volume percentage (vol％) were synthesized us-ing a spray pyrolysis technique.The effect of Fe doping on structural properties such as crystallite size,texture coefficient,mi-crostrain,dislocation densities etc.were evaluated from the X ray diffratometry (XRD) data.XRD data revealed a polycrystalline anatase TiO2 phase for sample synthesized up to 2 vol％ and mixed anatase and rutile crystalline phase for sample synthesized at 4 vol％ Fe doped TiO2.The crystalline size was observed to decrease with increase in Fe dopant vol％ and also other structur-al parameters changes with Fe dopant percentage.In the present work,electrical resistance was observed to decrease with a rise in Fe dopant vol％ and temperature of the sample.Thermal properties like temperature coefficient of resistance and activa-tion energy also showed strong correlation with Fe dopant vol％.Humidity sensing properties of the synthesized sample altered with a change in Fe dopant vol％.In the present paper,maximum sensitivity of about 88.7％ for the sample synthes-ized with 2 vol％ Fe doped TiO2 and also the lowest response and recovery time of about 52 and 3 s were reported for the same sample.