Bulk GaN-based SAW resonators with high quality factors for wireless temperature sensor

Surface acoustic wave (SAW) resonator with outstanding quality factors of 4829/6775 at the resonant/anti-resonant frequencies has been demonstrated on C-doped semi-insulating bulk GaN. The impact of device parameters including aspect ratio of length to width of resonators, number of interdigital tra...

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Bibliographic Details
Published in:Journal of semiconductors 2022-11, Vol.43 (11), p.114101-74
Main Authors: Lv, Hongrui, Shi, Xianglong, Ai, Yujie, Liu, Zhe, Lin, Defeng, Jia, Lifang, Cheng, Zhe, Yang, Jie, Zhang, Yun
Format: Article
Language:English
Subjects:
gallium nitride
quality factor
resonator
surface acoustic wave
temperature sensor
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Summary:Surface acoustic wave (SAW) resonator with outstanding quality factors of 4829/6775 at the resonant/anti-resonant frequencies has been demonstrated on C-doped semi-insulating bulk GaN. The impact of device parameters including aspect ratio of length to width of resonators, number of interdigital transducers, and acoustic propagation direction on resonator performance have been studied. For the first time, we demonstrate wireless temperature sensing from 21.6 to 120 °C with a stable temperature coefficient of frequency of –24.3 ppm/°C on bulk GaN-based SAW resonators.
ISSN:1674-4926
2058-6140
DOI:10.1088/1674-4926/43/11/114101