Effect of fabrication on high cycle fatigue properties of copper thin films

The influence of fabrication on the tensile and fatigue behavior of copper films manufactured by 3 kinds of fabrication methods was investigated. The tensile and high cycle fatigue tests were performed using the test machine developed by authors. Young's moduli (72, 71 and 69 GPa, respectively)...

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Bibliographic Details
Published in:Acta mechanica solida Sinica 2008-08, Vol.21 (4), p.318-326
Main Authors: Park, Jun-Hyub, An, Joong-Hyok, Kim, Yun-Jae, Choi, Hyeon-Chang
Format: Article
Language:English
Subjects:
Classical Mechanics
copper
Engineering
high cycle fatigue test
mechanical properties
Surfaces and Interfaces
Theoretical and Applied Mechanics
thin film
Thin Films
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Summary:The influence of fabrication on the tensile and fatigue behavior of copper films manufactured by 3 kinds of fabrication methods was investigated. The tensile and high cycle fatigue tests were performed using the test machine developed by authors. Young's moduli (72, 71 and 69 GPa, respectively) are lower than the literature values (108–145 GPa), while the yield strengths were as high as 358, 350 and 346 MPa, respectively and the ultimate strengths as 462, 456 and 446 MPa, respectively. There is not much difference in the tensile properties of the 3 kinds of films. There is little difference in the fatigue properties of the 3 kinds of films but one of them has shorter fatigue life than others in high cycle region and longer fatigue life than others in low cycle region.
ISSN:0894-9166
1860-2134
DOI:10.1007/s10338-008-0837-y