Angular distribution of sputtered atoms induced by low-energy heavy ion bombardment

O562.5; The sputtering yield angular distributions have been calculated based on the ion energy dependence of total sputtering yields for Ni and Motargets bombarded by low-energy Hg+ ion. The calculated curves show excellent agreement with the corresponding Wehner's experimental results of sput...

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Bibliographic Details
Published in:核技术（英文版） 2004-12, Vol.15 (6), p.340-343
Main Authors: Zhang Lai, ZHANG Zhu-lin
Format: Article
Language:English
Online Access:Get full text
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Summary:O562.5; The sputtering yield angular distributions have been calculated based on the ion energy dependence of total sputtering yields for Ni and Motargets bombarded by low-energy Hg+ ion. The calculated curves show excellent agreement with the corresponding Wehner's experimental results of sputtering yield angular distribution. The fact clearly demonstrated the intrinsic relation between the ion energy dependence of total sputtering yields and the sputtering yield angular distribution. This intrinsic relation had been ignored in Yamamura's papers (1981,1982) due to some obvious mistakes.
ISSN:1001-8042