Cooling enhancement of planar-balanced magnetron cathode

In physical vapor deposition on a magnetron cathode, temperature of sensitive components must be kept under threshold limit, so as to ensure the cathode reliability, the process reproducibility, and the best quality of thin films. This can be achieved by an adequate design to enhance the dissipation...

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Bibliographic Details
Published in:Nuclear science and techniques 2017-08, Vol.28 (8), p.69-74, Article 111
Main Authors: Salhi, M’hamed, Abaidia, Seddik El Hak, Mohamedi, Brahim, Laouar, Sofiane
Format: Article
Language:English
Subjects:
Energy
FLUENT
Hadrons
Heavy Ions
Nuclear Energy
Nuclear Physics
冷却强化
平衡
平面
温度分布
物理气相沉积
磁控
阴极
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Summary:In physical vapor deposition on a magnetron cathode, temperature of sensitive components must be kept under threshold limit, so as to ensure the cathode reliability, the process reproducibility, and the best quality of thin films. This can be achieved by an adequate design to enhance the dissipation of heat generated at the cathode. In this paper, temperature distribution and streamlines velocity of the cathode coolant inside a cathode magnetron are analyzed by using CFD solver ANSYS FLUENT in the single-phase method in combination with k-ε standards turbulent model. The results show that the design is appropriate under the calculation parameters, and for high heat densities some improvements are necessary to enhance heat dissipation and keep temperature under the threshold limit.
ISSN:1001-8042
2210-3147
DOI:10.1007/s41365-017-0271-2