Formulae for secondary electron yield from insulators and semiconductors

The processes and characteristics of secondary electron emission in insulators and semiconductors were studied, and the formulae for the maximum yield （6m） at Wpom 〈 800 eV and the secondary electron yield from insulators and semiconductors 6 at the primary incident energy of 2 keV ≤ Wpo ≤ 10 keV （δ...

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Bibliographic Details
Published in:Nuclear science and techniques 2017-10, Vol.28 (10), p.9-14, Article 141
Main Authors: Xie, Ai-Gen, Lai, Min, Chen, Yu-Lin, Xia, Yu-Qing
Format: Article
Language:English
Subjects:
Energy
Hadrons
Heavy Ions
Nuclear Energy
Nuclear Physics
二次电子
产额
公式
半导体
次级电子
电子发射特性
绝缘体
计算结果
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Summary:The processes and characteristics of secondary electron emission in insulators and semiconductors were studied, and the formulae for the maximum yield （6m） at Wpom 〈 800 eV and the secondary electron yield from insulators and semiconductors 6 at the primary incident energy of 2 keV ≤ Wpo ≤ 10 keV （δ2-10） and 10 keV ≤Wpo ≤ 100 keV （δ10-100） were deduced. The calculation results were compared with their corresponding experimental data. It is concluded that the deduced for- mulae can be used to calculate δ2-100 at Wpom _〈 800 eV.
ISSN:1001-8042
2210-3147
DOI:10.1007/s41365-017-0291-y