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Pd-gate MOS sensor for detection of methanol and propanol

The present paper focused on the detection of methanol and propanol using Pd-gate metal-oxide-semiconductor (MOS) sensor. Surface mor- phology and composition of the gate film were studied by scanning electron microscopy (SEM) and atomic force microscopy (AFM). The response of the sensor for propano...

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Published in:Journal of natural gas chemistry 2011-03, Vol.20 (2), p.123-127
Main Authors: Pandey, Preeti, Srivastava, J.K., Mishra, V.N., Dwivedi, R.
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Language:English
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cited_by cdi_FETCH-LOGICAL-c434t-ba87011f1f89bb33e99bd015f0df357975bdb84620c13fa9f1c1a540be659f943
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container_title Journal of natural gas chemistry
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creator Pandey, Preeti
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description The present paper focused on the detection of methanol and propanol using Pd-gate metal-oxide-semiconductor (MOS) sensor. Surface mor- phology and composition of the gate film were studied by scanning electron microscopy (SEM) and atomic force microscopy (AFM). The response of the sensor for propanol and methanol was measured as shift in capacitance-voltage (C-V) and conductance-voltage (G-V) curves of the MOS structure. The sensitivity of the sensor towards methanol was found to be greater than that towards propanol. It was 58.2% for methanol and 32% for propanol (at 0.6 V, 1 MHz) in terms of capacitance measurements, while in terms of conductance results the sensitivity was found to be 57.2% for methanol and 38.9% for propanol at 1 kHz. The discontinuities or cracks present in the microstructure of the gate material are believed to be mainly responsible for the high sensitivity of the sensor, going with the decomposition of gas molecules and subsequent hydrogen permeation through Pd.
doi_str_mv 10.1016/S1003-9953(10)60165-X
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subjects Alcohols: methanol, ethanol, etc
Alternative fuels. Production and utilization
Applied sciences
Atomic force microscopy
Cracks
Energy
Exact sciences and technology
Fuels
gas sensor
Gates
Metal oxide semiconductors
Methyl alcohol
MOS structure
MOS结构
Palladium
Scanning electron microscopy
sensitivity
Sensors
传感器检测
原子力显微镜
异丙醇
扫描电子显微镜
甲醇反应
金属氧化物半导体
title Pd-gate MOS sensor for detection of methanol and propanol
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