Studies on Wear and Corrosion Resistances of Carbon Nitride Thin Films on Ti Alloy

CNx/SiCN composite films were prepared on titanium ( Ti ) alloy substrates by Radio Frequency Plasma Enhanced Chemical Vapor Deposition ( RF-PECVD ). As a buffer layer, SiCN ensured the adhesion of the CNx thin films on Ti substrates. X-ray diffraction (XRD) measurement revealed that the composite f...

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Bibliographic Details
Published in:Wuhan University journal of natural sciences 2003-09, Vol.8 (3A), p.821-824
Main Authors: Li, J-C, Guo, G, Lu, X-F, Zhang, Z-H, Ye, M-S
Format: Article
Language:English
Subjects:
Buffer layers
Carbon nitride
Corrosion
Corrosion effects
Corrosion resistance
Corrosion tests
Corrosive wear
Electrochemistry
Microhardness
Plasma enhanced chemical vapor deposition
Silicon carbonitride
Sodium chloride
Substrates
Thin films
Titanium base alloys
Wear tests
X-ray diffraction
化学气相沉积法
碳氮化物薄膜
耐磨性
耐腐蚀性
钛合金
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Summary:CNx/SiCN composite films were prepared on titanium ( Ti ) alloy substrates by Radio Frequency Plasma Enhanced Chemical Vapor Deposition ( RF-PECVD ). As a buffer layer, SiCN ensured the adhesion of the CNx thin films on Ti substrates. X-ray diffraction (XRD) measurement revealed that the composite films possessed α-C3N4 structure.The microhardness of the films was 48 to 50 GPa. In or der totest the characteristics of wear and corrosion resistances, we prepared Ti alloy samples with and without CNx/SiCN composite films. Also for strengthening the effect of wear and corrosion, the wear tests were carried out under high load (12 MPa) and in 0. 9% NaCl solution. Results of the wear tests and the corrosive electrochemical measurements showed that the samples coated with CNx films had excellent charac-teristics of wear and corrosion resistances compared with Ti alloy substrate samples.
ISSN:1007-1202
1993-4998
DOI:10.1007/bf02900823