Boron removal from metallurgical grade silicon by oxidizing refining

A purification process was developed to remove impurity element boron from the metallurgical grade silicon by the electric arc furnace refining. The thermodynamic equilibria calculation and experiment to remove boron in the oxidizing atmosphere were performed and analyzed. Boron is removed as the ga...

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Bibliographic Details
Published in:Transactions of Nonferrous Metals Society of China 2009-04, Vol.19 (2), p.463-467
Main Author: 伍继君 马文会 杨斌 戴永年 K. MORITA
Format: Article
Language:English
Subjects:
electric arc furnace
metallurgical grade silicon
oxidizing refining
purification
thermodynamics
冶金级
平衡计算
杂质元素
氧化性气氛
氧化精炼
纯化工艺
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Summary:A purification process was developed to remove impurity element boron from the metallurgical grade silicon by the electric arc furnace refining. The thermodynamic equilibria calculation and experiment to remove boron in the oxidizing atmosphere were performed and analyzed. Boron is removed as the gaseous species BxOy and BxHzOy in O2 and H2O-O2 atmosphere respectively. The equilibrium pressure of BxHzOy is 10^5-10^10 times that of BxOy. Boron is removed and its content in silicon is reduced from 18 ×10 ^-6 to 2 × 10^-6 in the Ar-H2O-O2 atmosphere in the electric arc furnace.
ISSN:1003-6326
DOI:10.1016/S1003-6326(08)60296-4