Characteristics of VHF H2 Plasma Produced at High Pressure

A VHF H2 plasma was produced with the multi rod electrode at high pressure and the plasma parameters were measured as a function of pressure for different VHF powers at 60 MHz. It was found that when the pressure is increased, the ion saturation current peaks at certain pressure and finally decrease...

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Published in:Contributions to plasma physics (1988) 2008-05, Vol.48 (4), p.326-330
Main Authors: Yamauchi, Y., Takeuchi, Y., Takatsuka, H., Yamashita, H., Muta, H., Kawai, Y.
Format: Article
Language:English
Subjects:
high pressure H2 plasma
multi-rod electrode
plasma parameter
VHF plasma
wall potential
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container_end_page 330
container_issue 4
container_start_page 326
container_title Contributions to plasma physics (1988)
container_volume 48
creator Yamauchi, Y.
Takeuchi, Y.
Takatsuka, H.
Yamashita, H.
Muta, H.
Kawai, Y.
description A VHF H2 plasma was produced with the multi rod electrode at high pressure and the plasma parameters were measured as a function of pressure for different VHF powers at 60 MHz. It was found that when the pressure is increased, the ion saturation current peaks at certain pressure and finally decreases at high pressures, while the electron temperature is around 10 eV. The wall potential at high pressure was lower than the values estimated from the electron temperature using the probe theory. Furthermore, the anomalous reduction of the electron saturation current was observed. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
doi_str_mv 10.1002/ctpp.200810056
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fullrecord <record><control><sourceid>wiley_istex</sourceid><recordid>TN_cdi_wiley_primary_10_1002_ctpp_200810056_CTPP200810056</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>CTPP200810056</sourcerecordid><originalsourceid>FETCH-LOGICAL-i2246-3d134423461225e0fa3d0bd4f78d7bd58b47f037ef7f2ce5d975a32752470c773</originalsourceid><addsrcrecordid>eNo9j01PAjEURRujiYhuXfcPDL6-fs24MxNhNKCzQF02ZdrKKATSDlH-vUMwrG7uTc5NDiG3DEYMAO-abrsdIUDeN6nOyIBJZBkvcnVOBpArnjEQeEmuUvoCgEIJNiD35dJG23Q-tqlrm0Q3gb5XY1ohrVc2rS2t48btGu-o7WjVfi77wae0i_6aXAS7Sv7mP4fkbfw4L6ts-jp5Kh-mWYsoVMYd40IgF4ohSg_BcgcLJ4LOnV44mS-EDsC1Dzpg46UrtLQctUShodGaD0lx_P1pV35vtrFd27g3DMxB2xy0zUnblPO6PrWezY5sb-d_T6yN30ZprqX5eJmYSrDZvH6WZsb_AC3nW5M</addsrcrecordid><sourcetype>Publisher</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>Characteristics of VHF H2 Plasma Produced at High Pressure</title><source>Wiley</source><creator>Yamauchi, Y. ; Takeuchi, Y. ; Takatsuka, H. ; Yamashita, H. ; Muta, H. ; Kawai, Y.</creator><creatorcontrib>Yamauchi, Y. ; Takeuchi, Y. ; Takatsuka, H. ; Yamashita, H. ; Muta, H. ; Kawai, Y.</creatorcontrib><description>A VHF H2 plasma was produced with the multi rod electrode at high pressure and the plasma parameters were measured as a function of pressure for different VHF powers at 60 MHz. It was found that when the pressure is increased, the ion saturation current peaks at certain pressure and finally decreases at high pressures, while the electron temperature is around 10 eV. The wall potential at high pressure was lower than the values estimated from the electron temperature using the probe theory. Furthermore, the anomalous reduction of the electron saturation current was observed. (© 2008 WILEY‐VCH Verlag GmbH &amp; Co. KGaA, Weinheim)</description><identifier>ISSN: 0863-1042</identifier><identifier>EISSN: 1521-3986</identifier><identifier>DOI: 10.1002/ctpp.200810056</identifier><language>eng</language><publisher>Berlin: WILEY-VCH Verlag</publisher><subject>high pressure H2 plasma ; multi-rod electrode ; plasma parameter ; VHF plasma ; wall potential</subject><ispartof>Contributions to plasma physics (1988), 2008-05, Vol.48 (4), p.326-330</ispartof><rights>Copyright © 2008 WILEY‐VCH Verlag GmbH &amp; Co. KGaA, Weinheim</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,780,784,27923,27924</link.rule.ids></links><search><creatorcontrib>Yamauchi, Y.</creatorcontrib><creatorcontrib>Takeuchi, Y.</creatorcontrib><creatorcontrib>Takatsuka, H.</creatorcontrib><creatorcontrib>Yamashita, H.</creatorcontrib><creatorcontrib>Muta, H.</creatorcontrib><creatorcontrib>Kawai, Y.</creatorcontrib><title>Characteristics of VHF H2 Plasma Produced at High Pressure</title><title>Contributions to plasma physics (1988)</title><addtitle>Contrib. Plasma Phys</addtitle><description>A VHF H2 plasma was produced with the multi rod electrode at high pressure and the plasma parameters were measured as a function of pressure for different VHF powers at 60 MHz. It was found that when the pressure is increased, the ion saturation current peaks at certain pressure and finally decreases at high pressures, while the electron temperature is around 10 eV. The wall potential at high pressure was lower than the values estimated from the electron temperature using the probe theory. Furthermore, the anomalous reduction of the electron saturation current was observed. (© 2008 WILEY‐VCH Verlag GmbH &amp; Co. KGaA, Weinheim)</description><subject>high pressure H2 plasma</subject><subject>multi-rod electrode</subject><subject>plasma parameter</subject><subject>VHF plasma</subject><subject>wall potential</subject><issn>0863-1042</issn><issn>1521-3986</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2008</creationdate><recordtype>article</recordtype><recordid>eNo9j01PAjEURRujiYhuXfcPDL6-fs24MxNhNKCzQF02ZdrKKATSDlH-vUMwrG7uTc5NDiG3DEYMAO-abrsdIUDeN6nOyIBJZBkvcnVOBpArnjEQeEmuUvoCgEIJNiD35dJG23Q-tqlrm0Q3gb5XY1ohrVc2rS2t48btGu-o7WjVfi77wae0i_6aXAS7Sv7mP4fkbfw4L6ts-jp5Kh-mWYsoVMYd40IgF4ohSg_BcgcLJ4LOnV44mS-EDsC1Dzpg46UrtLQctUShodGaD0lx_P1pV35vtrFd27g3DMxB2xy0zUnblPO6PrWezY5sb-d_T6yN30ZprqX5eJmYSrDZvH6WZsb_AC3nW5M</recordid><startdate>200805</startdate><enddate>200805</enddate><creator>Yamauchi, Y.</creator><creator>Takeuchi, Y.</creator><creator>Takatsuka, H.</creator><creator>Yamashita, H.</creator><creator>Muta, H.</creator><creator>Kawai, Y.</creator><general>WILEY-VCH Verlag</general><general>WILEY‐VCH Verlag</general><scope>BSCLL</scope></search><sort><creationdate>200805</creationdate><title>Characteristics of VHF H2 Plasma Produced at High Pressure</title><author>Yamauchi, Y. ; Takeuchi, Y. ; Takatsuka, H. ; Yamashita, H. ; Muta, H. ; Kawai, Y.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i2246-3d134423461225e0fa3d0bd4f78d7bd58b47f037ef7f2ce5d975a32752470c773</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2008</creationdate><topic>high pressure H2 plasma</topic><topic>multi-rod electrode</topic><topic>plasma parameter</topic><topic>VHF plasma</topic><topic>wall potential</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Yamauchi, Y.</creatorcontrib><creatorcontrib>Takeuchi, Y.</creatorcontrib><creatorcontrib>Takatsuka, H.</creatorcontrib><creatorcontrib>Yamashita, H.</creatorcontrib><creatorcontrib>Muta, H.</creatorcontrib><creatorcontrib>Kawai, Y.</creatorcontrib><collection>Istex</collection><jtitle>Contributions to plasma physics (1988)</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Yamauchi, Y.</au><au>Takeuchi, Y.</au><au>Takatsuka, H.</au><au>Yamashita, H.</au><au>Muta, H.</au><au>Kawai, Y.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Characteristics of VHF H2 Plasma Produced at High Pressure</atitle><jtitle>Contributions to plasma physics (1988)</jtitle><addtitle>Contrib. Plasma Phys</addtitle><date>2008-05</date><risdate>2008</risdate><volume>48</volume><issue>4</issue><spage>326</spage><epage>330</epage><pages>326-330</pages><issn>0863-1042</issn><eissn>1521-3986</eissn><abstract>A VHF H2 plasma was produced with the multi rod electrode at high pressure and the plasma parameters were measured as a function of pressure for different VHF powers at 60 MHz. It was found that when the pressure is increased, the ion saturation current peaks at certain pressure and finally decreases at high pressures, while the electron temperature is around 10 eV. The wall potential at high pressure was lower than the values estimated from the electron temperature using the probe theory. Furthermore, the anomalous reduction of the electron saturation current was observed. (© 2008 WILEY‐VCH Verlag GmbH &amp; Co. KGaA, Weinheim)</abstract><cop>Berlin</cop><pub>WILEY-VCH Verlag</pub><doi>10.1002/ctpp.200810056</doi><tpages>5</tpages></addata></record>
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subjects high pressure H2 plasma
multi-rod electrode
plasma parameter
VHF plasma
wall potential
title Characteristics of VHF H2 Plasma Produced at High Pressure
url http://sfxeu10.hosted.exlibrisgroup.com/loughborough?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-11T16%3A12%3A27IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-wiley_istex&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Characteristics%20of%20VHF%20H2%20Plasma%20Produced%20at%20High%20Pressure&rft.jtitle=Contributions%20to%20plasma%20physics%20(1988)&rft.au=Yamauchi,%20Y.&rft.date=2008-05&rft.volume=48&rft.issue=4&rft.spage=326&rft.epage=330&rft.pages=326-330&rft.issn=0863-1042&rft.eissn=1521-3986&rft_id=info:doi/10.1002/ctpp.200810056&rft_dat=%3Cwiley_istex%3ECTPP200810056%3C/wiley_istex%3E%3Cgrp_id%3Ecdi_FETCH-LOGICAL-i2246-3d134423461225e0fa3d0bd4f78d7bd58b47f037ef7f2ce5d975a32752470c773%3C/grp_id%3E%3Coa%3E%3C/oa%3E%3Curl%3E%3C/url%3E&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true