Aerosol-Assisted Chemical Vapor Deposition of NbS2 and TaS2 Thin Films from Pentakis(dimethylamido)metal Complexes and 2-Methylpropanethiol

Thin films of NbS2 and TaS2 have been produced from [M(NMe2)5] (M = Nb, Ta) and tBuSH by aerosol‐assisted chemical vapor deposition on glass. Gold‐colored, reflective films were obtained and deposition took place at 250–350 °C for NbS2 and 225–450 °C for TaS2 using dichloromethane or hexanes as solv...

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Bibliographic Details
Published in:European Journal of Inorganic Chemistry 2005, Vol.2005 (20), p.4179-4185
Main Authors: Peters, Emily S., Carmalt, Claire J., Parkin, Ivan P., Tocher, Derek A.
Format: Review
Language:English
Subjects:
Aerosol-assisted CVD
Niobium disulfide
Tantalum sulfide
Thin film
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Summary:Thin films of NbS2 and TaS2 have been produced from [M(NMe2)5] (M = Nb, Ta) and tBuSH by aerosol‐assisted chemical vapor deposition on glass. Gold‐colored, reflective films were obtained and deposition took place at 250–350 °C for NbS2 and 225–450 °C for TaS2 using dichloromethane or hexanes as solvent. The niobium and tantalum sulfide films were analyzed by Raman spectroscopy, scanning electron microscopy (SEM), X‐ray powder diffraction, energy dispersive analysis of X‐rays (EDAX) and X‐ray photoelectron spectroscopy (XPS). In order to identify possible compounds present in the aerosol mist, the solution phase reaction of [M(NMe2)5] and five equivalents of tBuSH in toluene at room temperature was carried out. Yellow crystals of the partially substituted tantalum thiolate [Ta(S‐tBu)2(NMe2)3] were isolated. The X‐ray structure of [Ta(S‐tBu)2(NMe2)3] has been determined. (© Wiley‐VCH Verlag GmbH & Co. KGaA, 69451 Weinheim, Germany, 2005)
ISSN:1434-1948
1099-0682
DOI:10.1002/ejic.200500400