Elliott, D. J. (1986). Microlithography : process technology for IC fabrication / David J. Elliott: Process technology for IC fabrication. McGraw-Hill.
Chicago Style (17th ed.) CitationElliott, David J. Microlithography : Process Technology for IC Fabrication / David J. Elliott: Process Technology for IC Fabrication. New York: McGraw-Hill, 1986.
MLA (9th ed.) CitationElliott, David J. Microlithography : Process Technology for IC Fabrication / David J. Elliott: Process Technology for IC Fabrication. McGraw-Hill, 1986.
Warning: These citations may not always be 100% accurate.