Ruska, W. S. (1987). Microelectronic processing : an introduction to the manufacture of integrated circuits / W. Scot Ruska: An introduction to the manufacture of integrated circuits. McGraw-Hill.
Chicago Style (17th ed.) CitationRuska, W. Scot. Microelectronic Processing : An Introduction to the Manufacture of Integrated Circuits / W. Scot Ruska: An Introduction to the Manufacture of Integrated Circuits. New York ; London: McGraw-Hill, 1987.
MLA (9th ed.) CitationRuska, W. Scot. Microelectronic Processing : An Introduction to the Manufacture of Integrated Circuits / W. Scot Ruska: An Introduction to the Manufacture of Integrated Circuits. McGraw-Hill, 1987.
Warning: These citations may not always be 100% accurate.