Ehrlich, D. J., & Tsao, J. Y. (1989). Laser microfabrication : thin film processes and lithography / edited by Daniel J. Ehrlich, Jeffrey Y. Tsao.: Thin film processes and lithography. Academic Press.
Chicago Style (17th ed.) CitationEhrlich, Daniel J., and Jeffrey Y. Tsao. Laser Microfabrication : Thin Film Processes and Lithography / Edited by Daniel J. Ehrlich, Jeffrey Y. Tsao.: Thin Film Processes and Lithography. Boston ; London: Academic Press, 1989.
MLA (9th ed.) CitationEhrlich, Daniel J., and Jeffrey Y. Tsao. Laser Microfabrication : Thin Film Processes and Lithography / Edited by Daniel J. Ehrlich, Jeffrey Y. Tsao.: Thin Film Processes and Lithography. Academic Press, 1989.
Warning: These citations may not always be 100% accurate.