APA (7th ed.) Citation

Manos, D. M., & Flamm, D. L. (1989). Plasma etching : an introduction / edited by Dennis M. Manos, Daniel L.Flamm.: An introduction. Academic Press.

Chicago Style (17th ed.) Citation

Manos, Dennis M., and Daniel L. Flamm. Plasma Etching : An Introduction / Edited by Dennis M. Manos, Daniel L.Flamm.: An Introduction. Academic Press, 1989.

MLA (9th ed.) Citation

Manos, Dennis M., and Daniel L. Flamm. Plasma Etching : An Introduction / Edited by Dennis M. Manos, Daniel L.Flamm.: An Introduction. Academic Press, 1989.

Warning: These citations may not always be 100% accurate.