Stuart, R. V. (1983). Vacuum technology, thin films and sputtering : an introduction / R.V. Stuart: An introduction. Academic Press.
Chicago Style (17th ed.) CitationStuart, R. V. Vacuum Technology, Thin Films and Sputtering : An Introduction / R.V. Stuart: An Introduction. New York ; London: Academic Press, 1983.
MLA (9th ed.) CitationStuart, R. V. Vacuum Technology, Thin Films and Sputtering : An Introduction / R.V. Stuart: An Introduction. Academic Press, 1983.
Warning: These citations may not always be 100% accurate.