APA (7th ed.) Citation

Townsend, P. D., Kelly, J. C., & Hartley, N. E. W. (1976). Ion implantation, sputtering and their applications / by P.D. Townsend, J.C. Kelly, N.E.W. Hartley. Academic Press.

Chicago Style (17th ed.) Citation

Townsend, Peter David, John Clive Kelly, and Nicholas Edmund Whittam Hartley. Ion Implantation, Sputtering and Their Applications / by P.D. Townsend, J.C. Kelly, N.E.W. Hartley. London (etc.): Academic Press, 1976.

MLA (9th ed.) Citation

Townsend, Peter David, et al. Ion Implantation, Sputtering and Their Applications / by P.D. Townsend, J.C. Kelly, N.E.W. Hartley. Academic Press, 1976.

Warning: These citations may not always be 100% accurate.