Runyan, W. R., & Bean, K. E. (1990). Semiconductor integrated circuit processing technology / W.R. Runyan, K.E. Bean. Addison-Wesley.
Chicago Style (17th ed.) CitationRunyan, W. R., and K. E. Bean. Semiconductor Integrated Circuit Processing Technology / W.R. Runyan, K.E. Bean. Reading, Mass. ; Wokingham: Addison-Wesley, 1990.
MLA (9th ed.) CitationRunyan, W. R., and K. E. Bean. Semiconductor Integrated Circuit Processing Technology / W.R. Runyan, K.E. Bean. Addison-Wesley, 1990.
Warning: These citations may not always be 100% accurate.