APA (7th ed.) Citation

Jaeger, R. C. (1988). Introduction to microelectronic fabrication / Richard C. Jaeger. Addison-Wesley Pub. Co..

Chicago Style (17th ed.) Citation

Jaeger, Richard C. Introduction to Microelectronic Fabrication / Richard C. Jaeger. Reading, Mass.: Addison-Wesley Pub. Co., 1988.

MLA (9th ed.) Citation

Jaeger, Richard C. Introduction to Microelectronic Fabrication / Richard C. Jaeger. Addison-Wesley Pub. Co., 1988.

Warning: These citations may not always be 100% accurate.