Chapman, B. (1980). Glow discharge processes : sputtering and plasma etching / Brian Chapman: Sputtering and plasma etching. Wiley.
Chicago Style (17th ed.) CitationChapman, Brian. Glow Discharge Processes : Sputtering and Plasma Etching / Brian Chapman: Sputtering and Plasma Etching. New York ; Chichester: Wiley, 1980.
MLA (9th ed.) CitationChapman, Brian. Glow Discharge Processes : Sputtering and Plasma Etching / Brian Chapman: Sputtering and Plasma Etching. Wiley, 1980.
Warning: These citations may not always be 100% accurate.