Schuegraf, K. K. (1988). Handbook of thin-film deposition processes and techniques : principles, methods, equipment, and applications / edited by Klaus K. Schuegraf: Principles, methods, equipment, and applications. Noyes Publications.
Chicago Style (17th ed.) CitationSchuegraf, Klaus K. Handbook of Thin-film Deposition Processes and Techniques : Principles, Methods, Equipment, and Applications / Edited by Klaus K. Schuegraf: Principles, Methods, Equipment, and Applications. Park Ridge, N.J., U.S.A.: Noyes Publications, 1988.
MLA (9th ed.) CitationSchuegraf, Klaus K. Handbook of Thin-film Deposition Processes and Techniques : Principles, Methods, Equipment, and Applications / Edited by Klaus K. Schuegraf: Principles, Methods, Equipment, and Applications. Noyes Publications, 1988.