Society of Chemical Engineers (Japan) & Naka, Y. (1993). Introduction to VLSI process engineering / edited by the Society of Chemical Engineers of Japan ; [editor in chief Yujii Naka]. Chapman & Hall.
Chicago Style (17th ed.) CitationSociety of Chemical Engineers (Japan) and Yujii Naka. Introduction to VLSI Process Engineering / Edited by the Society of Chemical Engineers of Japan ; [editor in Chief Yujii Naka]. London: Chapman & Hall, 1993.
MLA (9th ed.) CitationSociety of Chemical Engineers (Japan) and Yujii Naka. Introduction to VLSI Process Engineering / Edited by the Society of Chemical Engineers of Japan ; [editor in Chief Yujii Naka]. Chapman & Hall, 1993.
Warning: These citations may not always be 100% accurate.