APA (7th ed.) Citation

Sivaram, S. (1995). Chemical vapor deposition : thermal and plasma deposition of electronic materials / Srinvasam Sivaram: Thermal and plasma deposition of electronic materials. Van Nostrand Reinhold.

Chicago Style (17th ed.) Citation

Sivaram, S. Chemical Vapor Deposition : Thermal and Plasma Deposition of Electronic Materials / Srinvasam Sivaram: Thermal and Plasma Deposition of Electronic Materials. New York: Van Nostrand Reinhold, 1995.

MLA (9th ed.) Citation

Sivaram, S. Chemical Vapor Deposition : Thermal and Plasma Deposition of Electronic Materials / Srinvasam Sivaram: Thermal and Plasma Deposition of Electronic Materials. Van Nostrand Reinhold, 1995.

Warning: These citations may not always be 100% accurate.