Institute of Electrical and Electronics Engineers & Trimmer, W. S. (1997). Micromechanics and MEMS : classic and seminal papers to 1990 / edited by William S. Trimmer: Classic and seminal papers to 1990. IEEE Press.
Chicago Style (17th ed.) CitationInstitute of Electrical and Electronics Engineers and William S. Trimmer. Micromechanics and MEMS : Classic and Seminal Papers to 1990 / Edited by William S. Trimmer: Classic and Seminal Papers to 1990. New York: IEEE Press, 1997.
MLA (9th ed.) CitationInstitute of Electrical and Electronics Engineers and William S. Trimmer. Micromechanics and MEMS : Classic and Seminal Papers to 1990 / Edited by William S. Trimmer: Classic and Seminal Papers to 1990. IEEE Press, 1997.
Warning: These citations may not always be 100% accurate.