Levinshtein, M. E., & Shur, M. (1997). Semiconductor technology : processing and novel fabrication techniques / edited by Mikhail E. Levinshtein, Michael S. Shur: Processing and novel fabrication techniques. Wiley.
Chicago Style (17th ed.) CitationLevinshtein, M. E., and Michael Shur. Semiconductor Technology : Processing and Novel Fabrication Techniques / Edited by Mikhail E. Levinshtein, Michael S. Shur: Processing and Novel Fabrication Techniques. New York ; Chichester: Wiley, 1997.
MLA (9th ed.) CitationLevinshtein, M. E., and Michael Shur. Semiconductor Technology : Processing and Novel Fabrication Techniques / Edited by Mikhail E. Levinshtein, Michael S. Shur: Processing and Novel Fabrication Techniques. Wiley, 1997.
Warning: These citations may not always be 100% accurate.