Elwenspoek, M., & Jansen, H. V. (1998). Silicon micromachining / M. Elwenspoek and H.V.Jansen. Cambridge University Press.
Chicago Style (17th ed.) CitationElwenspoek, M., and H. V. Jansen. Silicon Micromachining / M. Elwenspoek and H.V.Jansen. Cambridge: Cambridge University Press, 1998.
MLA (9th ed.) CitationElwenspoek, M., and H. V. Jansen. Silicon Micromachining / M. Elwenspoek and H.V.Jansen. Cambridge University Press, 1998.
Warning: These citations may not always be 100% accurate.