Moyne, J., Del Castillo, E., & Hurwitz, A. M. (2001). Run-to-run control in semiconductor manufacturing / edited by James Moyne, Enrique Del Castillo, Arnon Max Hurwitz. CRC Press.
Chicago Style (17th ed.) CitationMoyne, James, Enrique Del Castillo, and Arnon Max Hurwitz. Run-to-run Control in Semiconductor Manufacturing / Edited by James Moyne, Enrique Del Castillo, Arnon Max Hurwitz. Boca Raton, Fla.: CRC Press, 2001.
MLA (9th ed.) CitationMoyne, James, et al. Run-to-run Control in Semiconductor Manufacturing / Edited by James Moyne, Enrique Del Castillo, Arnon Max Hurwitz. CRC Press, 2001.
Warning: These citations may not always be 100% accurate.