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Mechanical microsensors / M. Elwenspoek, R.J. Wiergerink.

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Bibliographic Details
Main Author:	Elwenspoek, M. (Miko), 1948-
Other Authors:	Wiegerink, Remco J., 1964-
Format:	Book
Language:	English
Published:	Berlin ; London : Springer, c2001
Series:	Microtechnology and MEMS
Subjects:	Detectors > Design and construction Microelectromechanical systems > Design and construction Transducers Silicon Micromachining
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