APA (7th ed.) Citation

Campbell, S. A. (2001). The science and engineering of microelectronic fabrication / Stephen A. Campbell (2nd ed.). Oxford University Press.

Chicago Style (17th ed.) Citation

Campbell, Stephen A. The Science and Engineering of Microelectronic Fabrication / Stephen A. Campbell. 2nd ed. New York ; Oxford: Oxford University Press, 2001.

MLA (9th ed.) Citation

Campbell, Stephen A. The Science and Engineering of Microelectronic Fabrication / Stephen A. Campbell. 2nd ed. Oxford University Press, 2001.

Warning: These citations may not always be 100% accurate.