APA (7th ed.) Citation

Levinson, H. J. (2001). Principles of lithography / Harry J. Levinson. SPIE Press.

Chicago Style (17th ed.) Citation

Levinson, Harry J. Principles of Lithography / Harry J. Levinson. Bellingham, Wash., USA: SPIE Press, 2001.

MLA (9th ed.) Citation

Levinson, Harry J. Principles of Lithography / Harry J. Levinson. SPIE Press, 2001.

Warning: These citations may not always be 100% accurate.